Tan Kok Kiong, Andi Sudjana Putra, Sunan Huang
Precision control is one of the core issues required by ultraprecision machines discussed previously. A well-chosen control strategy will enable a complete control of the mechanical system to achieve a better positioning and often compensate for errors either implicitly [1] or explicitly as it will be explained in the subsequent chapters. The field of high-precision actuators is now an interesting subject of research worth spending millions of dollars annually. Precision control discussed hererefers to control of motion parameters of the order of micrometer or better. © 2008 by Taylor & Francis Group, LLC.
Department of Electrical and Computer Engineering, National University of Singapore, Singapore; Electrical and Computer Engineering, National University of Singapore, Singapore; Brawijaya University, Malang, Indonesia; Technische Universiteit, Eindhoven, Netherlands; National University of Singapore, Kent Ridge, Singapore; Shanghai Jiao Tong University, Shanghai, China
