Sukma W. Fitriani, Dionysius J. D. H. Santjojo, Masruroh, Setyawan P. Sakti, Tatsuhiko Aizawa
Diamond-like carbon (DLC) has been widely utilized in industries; e.g., the protective coating of punches and dies. The high-density plasma oxidation was used to make selective removal of the DLC films and to construct the three-dimensional micro-texture on the SKD11. Two-dimensional micro-texture was drawn onto these films via the maskless lithography patterning. Micro-dots with various diameters were utilized as a mask to make selective removal of unmasked DLC surfaces. The optical emission spectroscopy (OES) was used to make oxygen plasma diagnosis and to identify the active species for this plasma etching. The Raman spectroscopy was employed to analyze the masked and unmasked area after the etching process. The etching took place homogeneously within 7.2 ks process. The three-dimensional micro-texture of DLC was formed with the height of 18 μm. The formed micro-textures have a standard deviation less than 1 μm. © 2018 IEEE.
Department of Physics, Brawijaya University, Malang, Indonesia; Department of Engineering and Design, Shibaura Institute of Technology, Tokyo, Japan
